Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569772 | Method for producing an alternating phase mask | Josef Mathuni, Jurgen Knobloch | 2003-05-27 |
CN
Christoph Nolscher
Overall (2003): #248,376 of 273,478Top 95%
1
Patents 2003