Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576908 | Beam column for charged particle beam device | Hans-Peter Feuerbaum, Ralf Degenhardt | 2003-06-10 |
| 6555815 | Apparatus and method for examining specimen with a charged particle beam | Hans-Peter Feuerbaum | 2003-04-29 |
| 6555824 | Method and device for focusing a charged particle beam | Hans-Peter Feuerbaum | 2003-04-29 |
| 6510693 | Method and device for producing hot working gases | Timothy Griffin, Ulf Linder | 2003-01-28 |