SP

Song Peng

IBM: 3 patents #593 of 5,539Top 15%
📍 Pleasanton, CA: #25 of 248 inventorsTop 15%
🗺 California: #2,413 of 28,521 inventorsTop 9%
Overall (2003): #21,605 of 273,478Top 8%
3
Patents 2003

Issued Patents 2003

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6569581 Alternating phase shifting masks — 2003-05-27
6517978 Method to produce equal sized features in microlithography — 2003-02-11
6514648 Method to produce equal sized features in microlithography — 2003-02-04