Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622334 | Wafer edge cleaning utilizing polish pad material | Uldis A. Ziemins, Donald J. Delehanty, Jose M. Ocasio | 2003-09-23 |
| 6620029 | Apparatus and method for front side chemical mechanical planarization (CMP) of semiconductor workpieces | Jose M. Ocasio, Uldis A. Ziemins | 2003-09-16 |