Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656539 | Method and apparatus for performing laser CVD | Richard A. Haight, Alfred Wagner | 2003-12-02 |
| 6591154 | System and method for modifying enclosed areas for ion beam and laser beam bias effects | Richard A. Haight, Alfred Wagner | 2003-07-08 |