Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663747 | Apparatus and method for enhancing the uniform etching capability of an ion beam grid | David Garcia, Cherngye Hwang, Uriel Ortiz | 2003-12-16 |
| 6553644 | Fixture, carrier ring, and method for processing delicate workpieces | Wesley Hiroshi Tao, Li Fei Zheng | 2003-04-29 |