Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648979 | Apparatus and method for wafer cleaning | Marc Mattaroccia, Leonard C. Stevens, Jr. | 2003-11-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648979 | Apparatus and method for wafer cleaning | Marc Mattaroccia, Leonard C. Stevens, Jr. | 2003-11-18 |