Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569575 | Optical lithography beyond conventional resolution limits | Hans Biebuyck, Bruno Michel | 2003-05-27 |
| 6537499 | Method and device for identification of a substance | Andre Bernard, Hans Biebuyck, Emmanuel Delamarche, Bruno Michel | 2003-03-25 |