Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6531411 | Surface roughness improvement of SIMOX substrates by controlling orientation of angle of starting material | Anthony G. Domenicucci, Neena Garg, Kenneth J. Giewont, Richard J. Murphy, Gerd Pfeiffer +2 more | 2003-03-11 |