Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541349 | Shallow trench isolation using non-conformal dielectric and planarizatrion | Senthilkumar Arthanari, Shaw-Ning Mei | 2003-04-01 |
| 6531265 | Method to planarize semiconductor surface | Shaw-Ning Mei, T. Howard Shillingford | 2003-03-11 |