Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599173 | Method to prevent leaving residual metal in CMP process of metal interconnect | Jose Luis Cruz, Timothy C. Krywanczyk, Douglas K. Sturtevant | 2003-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599173 | Method to prevent leaving residual metal in CMP process of metal interconnect | Jose Luis Cruz, Timothy C. Krywanczyk, Douglas K. Sturtevant | 2003-07-29 |