Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6516238 | Semiconductor factory automation system and method for transporting semiconductor wafers | Jin Sun Kim, Moon Kim, Tae Ho Lee, Won-Soo Cho, Yung-Hwan Chae +3 more | 2003-02-04 |