Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518134 | Method for fabricating a semiconductor device with an air tunnel formed in the lower part of a transistor channel | Hee-Yong Yun | 2003-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518134 | Method for fabricating a semiconductor device with an air tunnel formed in the lower part of a transistor channel | Hee-Yong Yun | 2003-02-11 |