Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521909 | Thin film semiconductor device containing polycrystalline Si-Ge alloy and method for producing thereof | Shinya Yamaguchi, Takeo Shiba, Mutsuko Hatano | 2003-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521909 | Thin film semiconductor device containing polycrystalline Si-Ge alloy and method for producing thereof | Shinya Yamaguchi, Takeo Shiba, Mutsuko Hatano | 2003-02-18 |