KO

Kenichi Okubo

TL Tokyo Electron Limited: 1 patents #101 of 380Top 30%
Overall (2003): #180,035 of 273,478Top 70%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6507770 Substrate processing system and substrate processing method Masanori Tateyama, Jun Ookura 2003-01-14