Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667485 | Ion implanting apparatus and sample processing apparatus | Hiroyuki Tomita | 2003-12-23 |
| 6614190 | Ion implanter | Hiroyuki Tomita, Isao Hashimoto, Yasunori Nakano, Takayoshi Seki | 2003-09-02 |
| 6570171 | Ion implanter | Hiroyuki Tomita | 2003-05-27 |