Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559031 | Method of fabricating semiconductor device having element isolation trench | — | 2003-05-06 |
| 6512147 | Apparatus and process for generating mixed multi-component vapor | Yukio Inaba, Hiroshi Kofuji | 2003-01-28 |