Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648728 | Polishing system | Hiroyuki Kojima, Tetsuo Ohkawa | 2003-11-18 |
| 6576552 | Method for polishing semiconductor device | Hiroyuki Kojima, Tetsuo Ookawa, Mariko Urushibara | 2003-06-10 |
| 6531399 | Polishing method | Hiroyuki Kojima, Tetsuo Ohkawa | 2003-03-11 |