Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6658321 | Substrate processing method and apparatus | Akihiro Osaka, Masaki Murobayashi, Kouichi Noto | 2003-12-02 |
| 6641350 | Dual loading port semiconductor processing equipment | Takanobu Nakashima, Hidehiro Yanagawa | 2003-11-04 |
| 6638860 | Method and apparatus for processing substrates and method for manufacturing a semiconductor device | Masahiro Teramoto, Norio Akutsu, Kouichi Noto | 2003-10-28 |
| 6540469 | Substrate processing apparatus | Kouichi Noto | 2003-04-01 |