Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6615499 | Method for producing cerium oxide, cerium oxide abrasive, method for polishing substrate using the same and method for manufacturing semiconductor device | Jun Matsuzawa, Atsushi Sugimoto, Masato Yoshida, Keizou Hirai, Yuuto Ootsuki | 2003-09-09 |