Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6510697 | System and method for recovering from a power failure in a cryopump | Maureen C. Buonpane, Philip D. Acomb, Brian Foley, Michael J. Eacobacci, Stephen J. Yamartino | 2003-01-28 |