Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579151 | Retaining ring with active edge-profile control by piezoelectric actuator/sensors | Tung-Ching Tseng | 2003-06-17 |
SL
Sheng-Yung Liu
Overall (2003): #120,019 of 273,478Top 45%
1
Patents 2003