Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635567 | Method of producing alignment marks | Eva Ebertseder, Torsten Werneke, Jochen Hanebeck, Jürgen Pahlitzsch | 2003-10-21 |
| 6559067 | Method for patterning an organic antireflection layer | Gregoire Grandremy | 2003-05-06 |
| 6559547 | Patterning of content areas in multilayer metalization configurations of semiconductor components | Albrecht Kieslich, Peter Thieme, Lars Voland | 2003-05-06 |