Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE38372 | Narrow band excimer laser and wavelength detecting apparatus | Masahiko Kowaka, Yukio Kobayashi | 2003-12-30 |
| 6636297 | Vacuum ultraviolet laser wavelength measuring apparatus | Tatsuo Enami, Shinji Nagai | 2003-10-21 |
| 6627843 | Casing for laser device, production method and cleaning method of the same | Yasuo Itakura, Fumika Yoshida | 2003-09-30 |
| 6628682 | Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatus | Kiwamu Takehisa, Kouji Shio, Shinji Nagai, Yasuaki Iwata | 2003-09-30 |
| 6583874 | Spectrometer with holographic and echelle gratings | Toru Suzuki | 2003-06-24 |
| 6573989 | Spectrometer | Toru Suzuki | 2003-06-03 |
| 6560269 | Fluorine laser device | Kiwamu Takehisa, Tatsuya Ariga | 2003-05-06 |
| 6553042 | Laser apparatus for generating vacuum ultraviolet narrow-band laser beams | Koji Shio, Toru Suzuki | 2003-04-22 |
| 6539037 | Laser apparatus | Koji Shio, Toru Suzuki | 2003-03-25 |
| 6526086 | Band narrowing laser | Hirokazu Tanaka, Tatsuya Ariga | 2003-02-25 |