Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642118 | Method for eliminating polysilicon residue by fully converting the polysilicon into silicon dioxide | Chun-Lien Su, Ming-Shang Chen | 2003-11-04 |
| 6620714 | Method for reducing oxidation encroachment of stacked gate layer | Chun-Lien Su, Ming-Shang Chen | 2003-09-16 |