Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6533521 | Integrated substrate handler having pre-aligner and storage pod access mechanism | Mila Genov | 2003-03-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6533521 | Integrated substrate handler having pre-aligner and storage pod access mechanism | Mila Genov | 2003-03-18 |