Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605811 | Electron beam lithography system and method | Yasuhiko Kojima, Takaomi Ito, Katsumi Yokota, Tetsuyuki Okabayashi, Akio Otani +1 more | 2003-08-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605811 | Electron beam lithography system and method | Yasuhiko Kojima, Takaomi Ito, Katsumi Yokota, Tetsuyuki Okabayashi, Akio Otani +1 more | 2003-08-12 |