Kenichi Kawakami

AD Advantest: 2 patents #18 of 100Top 20%

📍 Toyohashi, JP: #11 of 101 inventorsTop 15%

Overall (2003): #57,323 of 273,478Top 25%

Patents 2003

Issued Patents 2003

Showing 1–2 of 2 patents

Patent #	Title	Co-Inventors	Date
6573516	Electron-beam lithography method and electron-beam lithography system	—	2003-06-03
6546544	Method of producing mask data for partial one-shot transfer exposure and exposure method	—	2003-04-08