Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623801 | Method of producing high-purity polycrystalline silicon | Yoshifumi Yatsurugi | 2003-09-23 |
| 6503563 | Method of producing polycrystalline silicon for semiconductors from saline gas | Yoshifumi Yatsurugi | 2003-01-07 |