Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518084 | Method of producing a micromechanical structure for a micro-electromechanical element | Stefan Seitz, Leonhard Hoefter, Juergen Kruckow, Dieter Bollmann | 2003-02-11 |
KN
Karl Neumeier
Overall (2003): #184,187 of 273,478Top 70%
1
Patents 2003