Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6655423 | Unified pod quick-opening apparatus | John M. Rush, Chawshiang Wu, Kung Chris Wu | 2003-12-02 |
| 6610993 | Load port door assembly with integrated wafer mapper | Eric Meyhofer, Kenneth A. Hardy, Cyril M. Kindt | 2003-08-26 |
| 6592317 | Pod loader interface end effectors | John M. Rush | 2003-07-15 |