Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613241 | MEMS elements with integrated porous membranes and method of making the same | Axel Scherer, Theodore Doll | 2003-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613241 | MEMS elements with integrated porous membranes and method of making the same | Axel Scherer, Theodore Doll | 2003-09-02 |