Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647796 | Semiconductor nitride pressure microsensor and method of making and using the same | Robert A. Beach, Thomas C. McGill | 2003-11-18 |
| 6579068 | Method of manufacture of a suspended nitride membrane and a microperistaltic pump using the same | Paul Bridger, Robert A. Beach, Thomas C. McGill | 2003-06-17 |