Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638576 | Apparatus and method of coating a web | Christopher L. Bower, Kim E. Goppert | 2003-10-28 |
| 6605198 | Apparatus for, and method of, depositing a film on a substrate | Peter J. Clarke | 2003-08-12 |
| 6584777 | Apparatus for and method of filtering a fluid | — | 2003-07-01 |
| 6572516 | Device to reduce electrostatic pattern transfer in coating processes | Terry Blake | 2003-06-03 |
| 6562141 | Dual degas/cool loadlock cluster tool | — | 2003-05-13 |