Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6621069 | Optical encoder with an electric field—screening grit | Wolfgang Holzapfel, Sebastian Tondorf, Peter Pechak, Herbert Mauerberger, Franz Obermaier +1 more | 2003-09-16 |
| 6552810 | Optical measuring system | Michael Hermann, Wolfgang Holzapfel, Volker Hofer | 2003-04-22 |
| 6541761 | Optical position measuring system with a graduation that causes essentially only first orders of diffraction | Wolfgang Holzapfel | 2003-04-01 |
| 6511921 | Methods for reducing the reactivity of a semiconductor substrate surface and for evaluating electrical properties of a semiconductor substrate | Christopher Alan Panczyk, Jonathan M. Madsen | 2003-01-28 |