Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593655 | Method for producing hydrogenated silicon oxycarbide films having low dielectric constant | Mark Loboda | 2003-07-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593655 | Method for producing hydrogenated silicon oxycarbide films having low dielectric constant | Mark Loboda | 2003-07-15 |