Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6586169 | Lithography exposure device and lithography process | Uwe Brauch | 2003-07-01 |
| 6570896 | Laser radiation source and process for generating a coherent total laser radiation field | Norbert Bissinger, Uwe Brauch, Guido Hergenhan, Marcus Scholl, Bernd Luecke +1 more | 2003-05-27 |