Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596115 | Method and device for carrying out working steps on miniaturized modules | — | 2003-07-22 |
| 6521068 | Method and device for detaching a segment of a material layer | Ralf Baehnisch, Bernd Huettner | 2003-02-18 |