Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589337 | Method of producing silicon carbide device by cleaning silicon carbide substrate with oxygen gas | Shinichi Mukainakano, Takeshi Hasegawa, Ayahiko Ichimiya, Tomohiro Aoyama, Kiyoshige Kato | 2003-07-08 |