Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521538 | Method of forming a trench with a rounded bottom in a semiconductor device | Hajime Soga, Kenji Kondo, Yoshikazu Sakano, Mikimasa Suzuki | 2003-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521538 | Method of forming a trench with a rounded bottom in a semiconductor device | Hajime Soga, Kenji Kondo, Yoshikazu Sakano, Mikimasa Suzuki | 2003-02-18 |