Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6581669 | Sputtering target for depositing silicon layers in their nitride or oxide form and a process for its preparation | Martin Weigert | 2003-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6581669 | Sputtering target for depositing silicon layers in their nitride or oxide form and a process for its preparation | Martin Weigert | 2003-06-24 |