Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656528 | Method of making specular infrared mirrors for use in optical devices | Yves Tremblay | 2003-12-02 |
| 6635509 | Wafer-level MEMS packaging | — | 2003-10-21 |
| 6602791 | Manufacture of integrated fluidic devices | Heather Tyler | 2003-08-05 |
| 6555441 | Method of aligning structures on opposite sides of a wafer | — | 2003-04-29 |
| 6537623 | Manufacture of silica waveguides with minimal absorption | Manuel Grondin | 2003-03-25 |