Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656664 | Method of forming minute focusing lens | Yoichi Takahashi, Hiroyuki Matsui | 2003-12-02 |
| 6560767 | Process for making photomask pattern data and photomask | Naoki Shimohakamada, Wakahiko Sakata | 2003-05-06 |
| 6523163 | Method for forming pattern data and method for writing a photomask with additional patterns | — | 2003-02-18 |