Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599667 | Halftone phase shift photomask and blank for halftone phase shift photomask | Satoshi Yusa, Toshifumi Yokoyama, Shigeki Sumida, Toshiaki Motonaga, Yoshinori Kinase +3 more | 2003-07-29 |