Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541168 | Vacuum ultraviolet transmitting direct deposit vitrified silicon oxyfluoride lithography glass photomask blanks | John T. Brown, Lisa Anne Moore, Susan Lee Schiefelbein, Robert S. Pavlik, Jr. | 2003-04-01 |