Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670621 | Clean room arrangement for electron beam lithography | — | 2003-12-30 |
| 6653645 | Deflection lens device for electron beam lithography | — | 2003-11-25 |
| 6528934 | Beam forming region for electron gun | Shunlu Xiao | 2003-03-04 |