Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641705 | Apparatus and method for reducing differential sputter rates | Michael William Phaneuf, Richard F. Shuman, Kathryn Noll, J. David Casey, Jr. | 2003-11-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641705 | Apparatus and method for reducing differential sputter rates | Michael William Phaneuf, Richard F. Shuman, Kathryn Noll, J. David Casey, Jr. | 2003-11-04 |