Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551367 | Process for preparing metal oxide slurry suitable for semiconductor chemical mechanical polishing | Jae Seok Lee, Seok Jin Kim, Tu Won Chang | 2003-04-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551367 | Process for preparing metal oxide slurry suitable for semiconductor chemical mechanical polishing | Jae Seok Lee, Seok Jin Kim, Tu Won Chang | 2003-04-22 |