Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649461 | Method of angle implant to improve transistor reverse narrow width effect | Tommy Lai, Yung-Tao Lin | 2003-11-18 |
| 6521540 | Method for making self-aligned contacts to source/drain without a hard mask layer | — | 2003-02-18 |
| 6509264 | Method to form self-aligned silicide with reduced sheet resistance | Yung-Tao Lin | 2003-01-21 |