Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659111 | Cleaning gas and method for cleaning vacuum treatment apparatus by flowing the cleaning gas | Isamu Mouri, Tetsuya Tamura, Tadayuki Kawashima, Masahiko Matsudo, Tatsuo Hatano | 2003-12-09 |